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Perkin Elmer Micralign Models 220 and 240 Service Manual

Make: Perkin Elmer Model: 220, 240 Reference No: M-025110215
This manual contains the service instructions for Models 220 and 24 of the Micralign Projection Mask Alignment System. Detailed operating procedures are covered in the Micralign Models 220 and 240 Operation Manual. This maintenance manual provides descriptions, procedures, and data that enable qualified technical personnel to maintain the instrument effectively. (see also M-008130305)
Status: Active